Optimal control of a CVD reactor for prescribed temperature behavior SAND-95-8224 DE95 011336

Optimal control of a CVD reactor for prescribed temperature behavior

SAND-95-8224 DE95 011336

Call No. (NDL): LS-DE95/011336
Bibliographic ID of National Diet Library: 000005521863

Material type: 規格・テクニカルリポート類

Author: Meza, J. Cほか

Publisher: -

Publication date: 1995

Material Format: Microform

Capacity, size, etc.: 24 p. (1 microfiche)

NDC: -

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Microform

Material Type: 規格・テクニカルリポート類
Title: Optimal control of a CVD reactor for prescribed temperature behavior
Author/Editor: Meza, J. C
Plantenga, T. D
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 24 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-8224
テクニカルリポート番号 : DE95 011336
Holding library: 国立国会図書館
Call No.: LS-DE95/011336
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005521863
http://id.ndl.go.jp/bib/000005521863
Bibliographic Record Category (NDL): 291