GaAs integrated circuit process characterization and non-destructive process monitoring by atomic force microscopy SAND-95-1108C DE95 013033 CONF-9505185

GaAs integrated circuit process characterization and non-destructive process monitoring by atomic force microscopy

SAND-95-1108C DE95 013033 CONF-9505185

Call No. (NDL): LS-DE95/013033
Bibliographic ID of National Diet Library: 000005532919

Material type: 規格・テクニカルリポート類

Author: Baca, A. Gほか

Publisher: -

Publication date: 1995

Material Format: Microform

Capacity, size, etc.: 8 p. (1 microfiche)

NDC: -

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Microform

Material Type: 規格・テクニカルリポート類
Title: GaAs integrated circuit process characterization and non-destructive process monitoring by atomic force microscopy
Author/Editor: Baca, A. G
Howard, A. J
Shul, R. J
Zolper, J. C
Rieger, D. J
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-1108C
テクニカルリポート番号 : DE95 013033
テクニカルリポート番号 : CONF-9505185
Holding library: 国立国会図書館
Call No.: LS-DE95/013033
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005532919
http://id.ndl.go.jp/bib/000005532919
Bibliographic Record Category (NDL): 291