High rate ECR etching of III-V nitride materials SAND-94-3244C DE95 013032 CONF-9505186

High rate ECR etching of III-V nitride materials

SAND-94-3244C DE95 013032 CONF-9505186

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Material Type: 規格・テクニカルリポート類
Title: High rate ECR etching of III-V nitride materials
Author/Editor: Shul, R. J
Howard, A. J
Kilcoyne, S. P
Pearton, S. J
Abernathy, C. R
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 16 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-94-3244C
テクニカルリポート番号 : DE95 013032
テクニカルリポート番号 : CONF-9505186
Holding library: 国立国会図書館
Call No.: LS-DE95/013032
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005533034
http://id.ndl.go.jp/bib/000005533034
Bibliographic Record Category (NDL): 291