Synthesis of silicon nitride powders in pulsed RF plasmas SAND-95-0934C DE95 011607 CONF-95052041

Synthesis of silicon nitride powders in pulsed RF plasmas

SAND-95-0934C DE95 011607 CONF-95052041

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Material Type: 規格・テクニカルリポート類
Title: Synthesis of silicon nitride powders in pulsed RF plasmas
Author/Editor: Buss, R. J
Ho, P
Babu, S. V
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 9 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-0934C
テクニカルリポート番号 : DE95 011607
テクニカルリポート番号 : CONF-95052041
Holding library: 国立国会図書館
Call No.: LS-DE95/011607
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005533075
http://id.ndl.go.jp/bib/000005533075
Bibliographic Record Category (NDL): 291