Coating strategy for enhancing illumination uniformity in a lithographic condenser UCRL-JC-119629 DE95 014371 CONF-94091778

Coating strategy for enhancing illumination uniformity in a lithographic condenser

UCRL-JC-119629 DE95 014371 CONF-94091778

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Material Type: 規格・テクニカルリポート類
Title: Coating strategy for enhancing illumination uniformity in a lithographic condenser
Author/Editor: Gaines, D. P
Vernon, S. P
Sommargren, G. E
Kania, D. R
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-119629
テクニカルリポート番号 : DE95 014371
テクニカルリポート番号 : CONF-94091778
Holding library: 国立国会図書館
Call No.: LS-DE95/014371
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005533463
http://id.ndl.go.jp/bib/000005533463
Bibliographic Record Category (NDL): 291