EUV lithography cost of ownership analysis UCRL-JC-119626 DE95 014675 CONF-94091779

EUV lithography cost of ownership analysis

UCRL-JC-119626 DE95 014675 CONF-94091779

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Material Type: 規格・テクニカルリポート類
Title: EUV lithography cost of ownership analysis
Author/Editor: Hawryluk, A. M
Ceglio, N. M
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 12 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-119626
テクニカルリポート番号 : DE95 014675
テクニカルリポート番号 : CONF-94091779
Holding library: 国立国会図書館
Call No.: LS-DE95/014675
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005533661
http://id.ndl.go.jp/bib/000005533661
Bibliographic Record Category (NDL): 291