Thermochemistry of gas-phase species relevant to titanium nitride CVD SAND-95-8636 DE95 014353 CONF-95052431

Thermochemistry of gas-phase species relevant to titanium nitride CVD

SAND-95-8636 DE95 014353 CONF-95052431

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Material Type: 規格・テクニカルリポート類
Title: Thermochemistry of gas-phase species relevant to titanium nitride CVD
Author/Editor: Allendorf, M. D
Janssen, C. L
Colvin, M. E
Melius, C. F
Nielsen, I. M. B
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 17 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-8636
テクニカルリポート番号 : DE95 014353
テクニカルリポート番号 : CONF-95052431
Holding library: 国立国会図書館
Call No.: LS-DE95/014353
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005533947
http://id.ndl.go.jp/bib/000005533947
Bibliographic Record Category (NDL): 291