Method for sputtering with low frequency alternating current. PATENT APPLICATION PATENTS-US-A8070835 DE95 017115 PAT-APPL-8070835

Method for sputtering with low frequency alternating current. PATENT APPLICATION

PATENTS-US-A8070835 DE95 017115 PAT-APPL-8070835

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Material Type: 規格・テクニカルリポート類
Title: Method for sputtering with low frequency alternating current. PATENT APPLICATION
Author/Editor: Timberlake, J. R
Publication Date: 1993
Publication Date (W3CDTF): 1993
Extent: 18 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : PATENTS-US-A8070835
テクニカルリポート番号 : DE95 017115
テクニカルリポート番号 : PAT-APPL-8070835
Holding library: 国立国会図書館
Call No.: LS-DE95/017115
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005534020
http://id.ndl.go.jp/bib/000005534020
Bibliographic Record Category (NDL): 291