Emissions from incineration of semiconductor manufacturing gases. Preliminary thermodynamic equilibrium analysis AAA-KTF/FKF-94/17 DE95 796388 ISBN-9516504949

Emissions from incineration of semiconductor manufacturing gases. Preliminary thermodynamic equilibrium analysis

AAA-KTF/FKF-94/17 DE95 796388 ISBN-9516504949

Call No. (NDL): LS-DE95/796388
Bibliographic ID of National Diet Library: 000005535242

Material type: 規格・テクニカルリポート類

Author: Uusikartano, T

Publisher: -

Publication date: 1995

Material Format: Microform

Capacity, size, etc.: 32 p. (1 microfiche)

NDC: -

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Microform

Material Type: 規格・テクニカルリポート類
Title: Emissions from incineration of semiconductor manufacturing gases. Preliminary thermodynamic equilibrium analysis
Author/Editor: Uusikartano, T
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 32 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : AAA-KTF/FKF-94/17
テクニカルリポート番号 : DE95 796388
テクニカルリポート番号 : ISBN-9516504949
Holding library: 国立国会図書館
Call No.: LS-DE95/796388
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005535242
http://id.ndl.go.jp/bib/000005535242
Bibliographic Record Category (NDL): 291