Surface micromachined sensors and actuators SAND-95-1892C DE95 016733 CONF-95102041

Surface micromachined sensors and actuators

SAND-95-1892C DE95 016733 CONF-95102041

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Material Type: 規格・テクニカルリポート類
Title: Surface micromachined sensors and actuators
Author/Editor: Sniegowski, J. J
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 10 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-1892C
テクニカルリポート番号 : DE95 016733
テクニカルリポート番号 : CONF-95102041
Holding library: 国立国会図書館
Call No.: LS-DE95/016733
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005538502
http://id.ndl.go.jp/bib/000005538502
Bibliographic Record Category (NDL): 291