Experiments and modeling with a large-area inductively coupled plasma (ICP) source UCRL-JC-120413 DE95 017045 CONF-95052701

Experiments and modeling with a large-area inductively coupled plasma (ICP) source

UCRL-JC-120413 DE95 017045 CONF-95052701

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Material Type: 規格・テクニカルリポート類
Title: Experiments and modeling with a large-area inductively coupled plasma (ICP) source
Author/Editor: Benjamin, R. D
DiPeso, G
Egan, P. O
Parker, G. J
Richardson, R. A
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 10 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-120413
テクニカルリポート番号 : DE95 017045
テクニカルリポート番号 : CONF-95052701
Holding library: 国立国会図書館
Call No.: LS-DE95/017045
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005538596
http://id.ndl.go.jp/bib/000005538596
Bibliographic Record Category (NDL): 291