In-situ deposition of sacrificial layers during ion implantation LBL-36783 DE96 000124 CONF-95022010

In-situ deposition of sacrificial layers during ion implantation

LBL-36783 DE96 000124 CONF-95022010

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Material Type: 規格・テクニカルリポート類
Title: In-situ deposition of sacrificial layers during ion implantation
Author/Editor: Anders, A
Anders, S
Brown, I. G
Yu, K. M
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 14 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LBL-36783
テクニカルリポート番号 : DE96 000124
テクニカルリポート番号 : CONF-95022010
Holding library: 国立国会図書館
Call No.: LS-DE96/000124
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005538779
http://id.ndl.go.jp/bib/000005538779
Bibliographic Record Category (NDL): 291