Status of ion implantation doping and isolation of III-V nitrides SAND-95-0949C DE95 017888 CONF-9510075

Status of ion implantation doping and isolation of III-V nitrides

SAND-95-0949C DE95 017888 CONF-9510075

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Material Type: 規格・テクニカルリポート類
Title: Status of ion implantation doping and isolation of III-V nitrides
Author/Editor: Zolper, J. C
Pearton, S. J
Abernathy, C. R
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-0949C
テクニカルリポート番号 : DE95 017888
テクニカルリポート番号 : CONF-9510075
Holding library: 国立国会図書館
Call No.: LS-DE95/017888
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005539358
http://id.ndl.go.jp/bib/000005539358
Bibliographic Record Category (NDL): 291