Synthesis of silicon nitride particles in pulsed Rf plasmas SAND-95-2359C DE96 002122 CONF-95102361

Synthesis of silicon nitride particles in pulsed Rf plasmas

SAND-95-2359C DE96 002122 CONF-95102361

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Material Type: 規格・テクニカルリポート類
Title: Synthesis of silicon nitride particles in pulsed Rf plasmas
Author/Editor: Buss, R. J
Babu, S. V
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 20 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-2359C
テクニカルリポート番号 : DE96 002122
テクニカルリポート番号 : CONF-95102361
Holding library: 国立国会図書館
Call No.: LS-DE96/002122
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005541423
http://id.ndl.go.jp/bib/000005541423
Bibliographic Record Category (NDL): 291