Assessing the capabilities of patternshop measurement systems INEL-95/00016 DE96 003505 CONF-95042271

Assessing the capabilities of patternshop measurement systems

INEL-95/00016 DE96 003505 CONF-95042271

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Material Type: 規格・テクニカルリポート類
Title: Assessing the capabilities of patternshop measurement systems
Author/Editor: Peters, F. E
Voigt, R. C
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 30 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : INEL-95/00016
テクニカルリポート番号 : DE96 003505
テクニカルリポート番号 : CONF-95042271
Holding library: 国立国会図書館
Call No.: LS-DE96/003505
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005544649
http://id.ndl.go.jp/bib/000005544649
Bibliographic Record Category (NDL): 291