Cavity nucleation and evolution in He-implanted Si and GaAs SAND-95-1383C DE96 003073 CONF-9511559

Cavity nucleation and evolution in He-implanted Si and GaAs

SAND-95-1383C DE96 003073 CONF-9511559

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Material Type: 規格・テクニカルリポート類
Title: Cavity nucleation and evolution in He-implanted Si and GaAs
Author/Editor: Follstaedt, D. M
Myers, S. M
Petersen, G. A
Barbour, J. C
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 9 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-1383C
テクニカルリポート番号 : DE96 003073
テクニカルリポート番号 : CONF-9511559
Holding library: 国立国会図書館
Call No.: LS-DE96/003073
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005545831
http://id.ndl.go.jp/bib/000005545831
Bibliographic Record Category (NDL): 291