Dry etching of III-V nitrides SAND-95-2699C DE96 003101 CONF-9511556

Dry etching of III-V nitrides

SAND-95-2699C DE96 003101 CONF-9511556

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Material Type: 規格・テクニカルリポート類
Title: Dry etching of III-V nitrides
Author/Editor: Pearton, S. J
Shul, R. J
McLane, G. F
Constantine, C
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-2699C
テクニカルリポート番号 : DE96 003101
テクニカルリポート番号 : CONF-9511556
Holding library: 国立国会図書館
Call No.: LS-DE96/003101
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005545839
http://id.ndl.go.jp/bib/000005545839
Bibliographic Record Category (NDL): 291