Microwave plasma cleaning apparatus CONF-9408174-4 DE96 004925

Microwave plasma cleaning apparatus

CONF-9408174-4 DE96 004925

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Material Type: 規格・テクニカルリポート類
Title: Microwave plasma cleaning apparatus
Author/Editor: Tsai, C. C
Nelson, W. D
Schechter, D. E
Thompson, L. M
Glover, A. L
Publication Date: 1994
Publication Date (W3CDTF): 1994
Extent: 11 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : CONF-9408174-4
テクニカルリポート番号 : DE96 004925
Holding library: 国立国会図書館
Call No.: LS-DE96/004925
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005546242
http://id.ndl.go.jp/bib/000005546242
Bibliographic Record Category (NDL): 291