Results of a pilot study and a proposal to build a high current pulsed nanosecond low energy Si ion beam for the detection of trace amounts of heavy impurities in silicon BNL-62332 DE96 003679

Results of a pilot study and a proposal to build a high current pulsed nanosecond low energy Si ion beam for the detection of trace amounts of heavy impurities in silicon

BNL-62332 DE96 003679

Call No. (NDL): LS-DE96/003679
Bibliographic ID of National Diet Library: 000005546729

Material type: 規格・テクニカルリポート類

Author: Jacobsen, F. Mほか

Publisher: -

Publication date: 1996

Material Format: Microform

Capacity, size, etc.: 17 p. (1 microfiche)

NDC: -

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Microform

Material Type: 規格・テクニカルリポート類
Title: Results of a pilot study and a proposal to build a high current pulsed nanosecond low energy Si ion beam for the detection of trace amounts of heavy impurities in silicon
Author/Editor: Jacobsen, F. M
Zarcone, M. J
Steski, D
Smith, K
Thieberger, P
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 17 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : BNL-62332
テクニカルリポート番号 : DE96 003679
Holding library: 国立国会図書館
Call No.: LS-DE96/003679
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005546729
http://id.ndl.go.jp/bib/000005546729
Bibliographic Record Category (NDL): 291