Real time measurement of epilayer strain using a simplified wafer curvature technique SAND-95-1731C DE96 004705 CONF-95115525

Real time measurement of epilayer strain using a simplified wafer curvature technique

SAND-95-1731C DE96 004705 CONF-95115525

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Material Type: 規格・テクニカルリポート類
Title: Real time measurement of epilayer strain using a simplified wafer curvature technique
Author/Editor: Floro, J. A
Chason, E
Lee, S. R
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-1731C
テクニカルリポート番号 : DE96 004705
テクニカルリポート番号 : CONF-95115525
Holding library: 国立国会図書館
Call No.: LS-DE96/004705
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005559077
http://id.ndl.go.jp/bib/000005559077
Bibliographic Record Category (NDL): 291