Multilayer coatings for the EUVL front-end test bed UCRL-JC-119623 DE96 004320 CONF-940917719

Multilayer coatings for the EUVL front-end test bed

UCRL-JC-119623 DE96 004320 CONF-940917719

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 規格・テクニカルリポート類
Title: Multilayer coatings for the EUVL front-end test bed
Author/Editor: Vernon, S. P
Carey, M. J
Gaines, D. P
Weber, F. J
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 11 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-119623
テクニカルリポート番号 : DE96 004320
テクニカルリポート番号 : CONF-940917719
Holding library: 国立国会図書館
Call No.: LS-DE96/004320
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005559118
http://id.ndl.go.jp/bib/000005559118
Bibliographic Record Category (NDL): 291