Smooth, low-damage, definition of InGaAlAs asymmetric Fabry-Perot optical transmission modulators by Cl2+Ar reactive-ion-beam etching SAND-96-0289C DE96 007342 CONF-9605821

Smooth, low-damage, definition of InGaAlAs asymmetric Fabry-Perot optical transmission modulators by Cl2+Ar reactive-ion-beam etching

SAND-96-0289C DE96 007342 CONF-9605821

Call No. (NDL): LS-DE96/007342
Bibliographic ID of National Diet Library: 000005560076

Material type: 規格・テクニカルリポート類

Author: Vawter, G. Aほか

Publisher: -

Publication date: 1996

Material Format: Microform

Capacity, size, etc.: 3 p. (1 microfiche)

NDC: -

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Material Type: 規格・テクニカルリポート類
Title: Smooth, low-damage, definition of InGaAlAs asymmetric Fabry-Perot optical transmission modulators by Cl2+Ar reactive-ion-beam etching
Author/Editor: Vawter, G. A
Fritz, I. J
Drummond, T. J
Lee, S. R
Hafich, M. J
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 3 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0289C
テクニカルリポート番号 : DE96 007342
テクニカルリポート番号 : CONF-9605821
Holding library: 国立国会図書館
Call No.: LS-DE96/007342
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005560076
http://id.ndl.go.jp/bib/000005560076
Bibliographic Record Category (NDL): 291