Reactive sputter deposition of boron nitride UCRL-JC-121985 DE96 008753 CONF-95103010

Reactive sputter deposition of boron nitride

UCRL-JC-121985 DE96 008753 CONF-95103010

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Material Type: 規格・テクニカルリポート類
Title: Reactive sputter deposition of boron nitride
Author/Editor: Jankowski, A. F
Hayes, J. P
McKernan, M. A
Makowiecki, D. M
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 20 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-121985
テクニカルリポート番号 : DE96 008753
テクニカルリポート番号 : CONF-95103010
Holding library: 国立国会図書館
Call No.: LS-DE96/008753
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005775443
http://id.ndl.go.jp/bib/000005775443
Bibliographic Record Category (NDL): 291