Reaction mechanism for titanium nitride CVD from TiCl4 and NH3 SAND-96-8443 DE96 006535 CONF-96051101

Reaction mechanism for titanium nitride CVD from TiCl4 and NH3

SAND-96-8443 DE96 006535 CONF-96051101

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Material Type: 規格・テクニカルリポート類
Title: Reaction mechanism for titanium nitride CVD from TiCl4 and NH3
Author/Editor: Larson, R. S
Allendorf, M. D
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 18 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-8443
テクニカルリポート番号 : DE96 006535
テクニカルリポート番号 : CONF-96051101
Holding library: 国立国会図書館
Call No.: LS-DE96/006535
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005775468
http://id.ndl.go.jp/bib/000005775468
Bibliographic Record Category (NDL): 291