Dry etch development of W/WSi short Gate MESFETs SAND-96-0076C DE96 004704 SAND-96-0781C CONF-9605022

Dry etch development of W/WSi short Gate MESFETs

SAND-96-0076C DE96 004704 SAND-96-0781C CONF-9605022

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Material Type: 規格・テクニカルリポート類
Title: Dry etch development of W/WSi short Gate MESFETs
Author/Editor: Shul, R. J
Sherwin, M. E
Baca, A. G
Zolper, J. C
Rieger, D. J
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 14 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0076C
テクニカルリポート番号 : DE96 004704
テクニカルリポート番号 : SAND-96-0781C
テクニカルリポート番号 : CONF-9605022
Holding library: 国立国会図書館
Call No.: LS-DE96/004704
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005776231
http://id.ndl.go.jp/bib/000005776231
Bibliographic Record Category (NDL): 291