Plasma etching of the Group-III nitrides SAND-96-0005C DE96 004578 CONF-9605023

Plasma etching of the Group-III nitrides

SAND-96-0005C DE96 004578 CONF-9605023

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Material Type: 規格・テクニカルリポート類
Title: Plasma etching of the Group-III nitrides
Author/Editor: Shul, R
Pearton, S. J
Abernathy, C. R
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 3 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0005C
テクニカルリポート番号 : DE96 004578
テクニカルリポート番号 : CONF-9605023
Holding library: 国立国会図書館
Call No.: LS-DE96/004578
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005776232
http://id.ndl.go.jp/bib/000005776232
Bibliographic Record Category (NDL): 291