TEOS surface chemistry on SiO(sub 2) at CVD temperatures and pressures SAND-95-1970C DE96 004680 CONF-9605021

TEOS surface chemistry on SiO(sub 2) at CVD temperatures and pressures

SAND-95-1970C DE96 004680 CONF-9605021

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Material Type: 規格・テクニカルリポート類
Title: TEOS surface chemistry on SiO(sub 2) at CVD temperatures and pressures
Author/Editor: Bartrarm, M. E
Moffat, H. K
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-1970C
テクニカルリポート番号 : DE96 004680
テクニカルリポート番号 : CONF-9605021
Holding library: 国立国会図書館
Call No.: LS-DE96/004680
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005776792
http://id.ndl.go.jp/bib/000005776792
Bibliographic Record Category (NDL): 291