Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine SAND-96-0094C DE96 010746 CONF-9606734

Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine

SAND-96-0094C DE96 010746 CONF-9606734

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Material Type: 規格・テクニカルリポート類
Title: Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine
Author/Editor: Sniegowski, J. J
Miller, S. L
LaVigne, G. F
Rodgers, M. S
McWhorter, P. J
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0094C
テクニカルリポート番号 : DE96 010746
テクニカルリポート番号 : CONF-9606734
Holding library: 国立国会図書館
Call No.: LS-DE96/010746
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005776800
http://id.ndl.go.jp/bib/000005776800
Bibliographic Record Category (NDL): 291