Application of chemical-mechanical polishing to planarization of surface-micromachined devises SAND-96-0944C DE96 009177 CONF-9606732

Application of chemical-mechanical polishing to planarization of surface-micromachined devises

SAND-96-0944C DE96 009177 CONF-9606732

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Material Type: 規格・テクニカルリポート類
Title: Application of chemical-mechanical polishing to planarization of surface-micromachined devises
Author/Editor: Nasby, R. D
Smith, J. H
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0944C
テクニカルリポート番号 : DE96 009177
テクニカルリポート番号 : CONF-9606732
Holding library: 国立国会図書館
Call No.: LS-DE96/009177
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005855230
http://id.ndl.go.jp/bib/000005855230
Bibliographic Record Category (NDL): 291