Ion implantation in compound semiconductors for high-performance electronic devices SAND-96-0802C DE96 008169 CONF-9605026

Ion implantation in compound semiconductors for high-performance electronic devices

SAND-96-0802C DE96 008169 CONF-9605026

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 規格・テクニカルリポート類
Title: Ion implantation in compound semiconductors for high-performance electronic devices
Author/Editor: Zolper, J. C
Baca, A. G
Sherwin, M. E
Klem, J. F
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 12 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0802C
テクニカルリポート番号 : DE96 008169
テクニカルリポート番号 : CONF-9605026
Holding library: 国立国会図書館
Call No.: LS-DE96/008169
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005855237
http://id.ndl.go.jp/bib/000005855237
Bibliographic Record Category (NDL): 291