Friction in surface micromachined microengines SAND-96-0374C DE96 006471 CONF-9602686

Friction in surface micromachined microengines

SAND-96-0374C DE96 006471 CONF-9602686

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Material Type: 規格・テクニカルリポート類
Title: Friction in surface micromachined microengines
Author/Editor: Miller, S. L
Sniegowski, J. J
LaVigne, G
McWhorter, P. J
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0374C
テクニカルリポート番号 : DE96 006471
テクニカルリポート番号 : CONF-9602686
Holding library: 国立国会図書館
Call No.: LS-DE96/006471
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005855420
http://id.ndl.go.jp/bib/000005855420
Bibliographic Record Category (NDL): 291