Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators SAND-96-0398C DE96 006476 CONF-9602688

Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators

SAND-96-0398C DE96 006476 CONF-9602688

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Material Type: 規格・テクニカルリポート類
Title: Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators
Author/Editor: Smith, J. H
Carson, R. F
Sullivan, C. T
McClellan, G
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0398C
テクニカルリポート番号 : DE96 006476
テクニカルリポート番号 : CONF-9602688
Holding library: 国立国会図書館
Call No.: LS-DE96/006476
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005855426
http://id.ndl.go.jp/bib/000005855426
Bibliographic Record Category (NDL): 291