Environmentally friendly polysilane photoresists SAND-95-1997C DE96 010706 CONF-95040217

Environmentally friendly polysilane photoresists

SAND-95-1997C DE96 010706 CONF-95040217

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Material Type: 規格・テクニカルリポート類
Title: Environmentally friendly polysilane photoresists
Author/Editor: Beach, J. V
Loy, D. A
Hsiao, Y. L
Waymouth, R. M
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 14 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-1997C
テクニカルリポート番号 : DE96 010706
テクニカルリポート番号 : CONF-95040217
Holding library: 国立国会図書館
Call No.: LS-DE96/010706
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005858031
http://id.ndl.go.jp/bib/000005858031
Bibliographic Record Category (NDL): 291