Development of ion sources for ion projection lithography LBL-38161 DE96 013228 CONF-9605822

Development of ion sources for ion projection lithography

LBL-38161 DE96 013228 CONF-9605822

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Material Type: 規格・テクニカルリポート類
Title: Development of ion sources for ion projection lithography
Author/Editor: Lee, Y
Gough, R. A
Kunkel, W. B
Leung, K. N
Perkins, L. T
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 18 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LBL-38161
テクニカルリポート番号 : DE96 013228
テクニカルリポート番号 : CONF-9605822
Holding library: 国立国会図書館
Call No.: LS-DE96/013228
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005858299
http://id.ndl.go.jp/bib/000005858299
Bibliographic Record Category (NDL): 291