Performance of a two-mirror, four-reflection, ring-field optical system at (lambda)=13 nm UCRL-JC-123013 DE96 013883 CONF-96049317

Performance of a two-mirror, four-reflection, ring-field optical system at (lambda)=13 nm

UCRL-JC-123013 DE96 013883 CONF-96049317

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Material Type: 規格・テクニカルリポート類
Title: Performance of a two-mirror, four-reflection, ring-field optical system at (lambda)=13 nm
Author/Editor: La Fontaine, B
Gaines, D. P
Kania, D. R
Sommargren, G. E
Baker, S. L
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 8 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-123013
テクニカルリポート番号 : DE96 013883
テクニカルリポート番号 : CONF-96049317
Holding library: 国立国会図書館
Call No.: LS-DE96/013883
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005858788
http://id.ndl.go.jp/bib/000005858788
Bibliographic Record Category (NDL): 291