Metal gettering by boron-silicide precipitates in boron-implanted silicon SAND-96-0870C DE96 015016 CONF-9609943

Metal gettering by boron-silicide precipitates in boron-implanted silicon

SAND-96-0870C DE96 015016 CONF-9609943

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Material Type: 規格・テクニカルリポート類
Title: Metal gettering by boron-silicide precipitates in boron-implanted silicon
Author/Editor: Myers, S. M
Petersen, G. A
Headley, T. J
Michael, J. R
Aselage, T. A
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 16 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-0870C
テクニカルリポート番号 : DE96 015016
テクニカルリポート番号 : CONF-9609943
Holding library: 国立国会図書館
Call No.: LS-DE96/015016
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005859292
http://id.ndl.go.jp/bib/000005859292
Bibliographic Record Category (NDL): 291