Effect of oxidations on phosphorus-diffused crystalline-silicon substrates SAND-96-1919C DE96 013236 CONF-96081161

Effect of oxidations on phosphorus-diffused crystalline-silicon substrates

SAND-96-1919C DE96 013236 CONF-96081161

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Material Type: 規格・テクニカルリポート類
Title: Effect of oxidations on phosphorus-diffused crystalline-silicon substrates
Author/Editor: Gee, J. M
King, R. R
Reiss, J. H
Mitchell, K. W
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 3 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-1919C
テクニカルリポート番号 : DE96 013236
テクニカルリポート番号 : CONF-96081161
Holding library: 国立国会図書館
Call No.: LS-DE96/013236
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005859306
http://id.ndl.go.jp/bib/000005859306
Bibliographic Record Category (NDL): 291