Plasma-induced-damage of GaN SAND-96-2022C DE96 014840 CONF-9610405

Plasma-induced-damage of GaN

SAND-96-2022C DE96 014840 CONF-9610405

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Material Type: 規格・テクニカルリポート類
Title: Plasma-induced-damage of GaN
Author/Editor: Shul, R. J
Zolper, J. C
Crawford, M. H
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 12 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-2022C
テクニカルリポート番号 : DE96 014840
テクニカルリポート番号 : CONF-9610405
Holding library: 国立国会図書館
Call No.: LS-DE96/014840
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005859313
http://id.ndl.go.jp/bib/000005859313
Bibliographic Record Category (NDL): 291