Key issues in plasma source ion implantation LA-UR-96-1741 DE96 011297 CONF-96052141

Key issues in plasma source ion implantation

LA-UR-96-1741 DE96 011297 CONF-96052141

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Material Type: 規格・テクニカルリポート類
Title: Key issues in plasma source ion implantation
Author/Editor: Rej, D. J
Faehl, R. J
Matossian, J. N
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 21 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LA-UR-96-1741
テクニカルリポート番号 : DE96 011297
テクニカルリポート番号 : CONF-96052141
Holding library: 国立国会図書館
Call No.: LS-DE96/011297
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005860018
http://id.ndl.go.jp/bib/000005860018
Bibliographic Record Category (NDL): 291