Role of AlN encapsulation of GaN during implant activation annealing SAND-96-2021C DE96 014841 CONF-9610406

Role of AlN encapsulation of GaN during implant activation annealing

SAND-96-2021C DE96 014841 CONF-9610406

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Material Type: 規格・テクニカルリポート類
Title: Role of AlN encapsulation of GaN during implant activation annealing
Author/Editor: Zolper, J. C
Rieger, D. J
Baca, A. G
Pearton, S. J
Lee, J. W
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-2021C
テクニカルリポート番号 : DE96 014841
テクニカルリポート番号 : CONF-9610406
Holding library: 国立国会図書館
Call No.: LS-DE96/014841
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005860111
http://id.ndl.go.jp/bib/000005860111
Bibliographic Record Category (NDL): 291