Surface characterization of optics for EUV lithography UCRL-JC-123042 DE96 013884 CONF-96049316

Surface characterization of optics for EUV lithography

UCRL-JC-123042 DE96 013884 CONF-96049316

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Material Type: 規格・テクニカルリポート類
Title: Surface characterization of optics for EUV lithography
Author/Editor: Gaines, D. P
Sweeney, D. W
DeLong, K. W
Vernon, S. P
Baker, S. L
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-123042
テクニカルリポート番号 : DE96 013884
テクニカルリポート番号 : CONF-96049316
Holding library: 国立国会図書館
Call No.: LS-DE96/013884
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005860134
http://id.ndl.go.jp/bib/000005860134
Bibliographic Record Category (NDL): 291