Image degradation from surface scatter in EUV optics UCRL-JC-123007 DE96 013665 CONF-96049318

Image degradation from surface scatter in EUV optics

UCRL-JC-123007 DE96 013665 CONF-96049318

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Material Type: 規格・テクニカルリポート類
Title: Image degradation from surface scatter in EUV optics
Author/Editor: Gaines, D. P
Daly, T. P
Stearns, D. G
LaFontaine, B
Sweeney, D. W
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 6 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : UCRL-JC-123007
テクニカルリポート番号 : DE96 013665
テクニカルリポート番号 : CONF-96049318
Holding library: 国立国会図書館
Call No.: LS-DE96/013665
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005860136
http://id.ndl.go.jp/bib/000005860136
Bibliographic Record Category (NDL): 291