Sixth workshop on the role of impurities and defects in silicon device processing NREL/SP-413-21640 DE96 013101 CONF-9608116-SUMM

Sixth workshop on the role of impurities and defects in silicon device processing

NREL/SP-413-21640 DE96 013101 CONF-9608116-SUMM

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Material Type: 規格・テクニカルリポート類
Title: Sixth workshop on the role of impurities and defects in silicon device processing
Author/Editor: Tan, T
Swanson, R
Sopori, B
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 11 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : NREL/SP-413-21640
テクニカルリポート番号 : DE96 013101
テクニカルリポート番号 : CONF-9608116-SUMM
Holding library: 国立国会図書館
Call No.: LS-DE96/013101
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005862694
http://id.ndl.go.jp/bib/000005862694
Bibliographic Record Category (NDL): 291