Performance tradeoffs for a surface micromachined microengine SAND-96-1958C DE96 014844 CONF-9610865

Performance tradeoffs for a surface micromachined microengine

SAND-96-1958C DE96 014844 CONF-9610865

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Material Type: 規格・テクニカルリポート類
Title: Performance tradeoffs for a surface micromachined microengine
Author/Editor: Miller, S. L
Sniegowski, J. J
LaVigne, G
McWhorter, P. J
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 11 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-1958C
テクニカルリポート番号 : DE96 014844
テクニカルリポート番号 : CONF-9610865
Holding library: 国立国会図書館
Call No.: LS-DE96/014844
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005862811
http://id.ndl.go.jp/bib/000005862811
Bibliographic Record Category (NDL): 291