Hybrid gas-metal co-implantation with a modified vacuum arc ion source LBL-38514 DE97 000920 CONF-96099413

Hybrid gas-metal co-implantation with a modified vacuum arc ion source

LBL-38514 DE97 000920 CONF-96099413

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Material Type: 規格・テクニカルリポート類
Title: Hybrid gas-metal co-implantation with a modified vacuum arc ion source
Author/Editor: Oks, E. M
Yushkov, G. Y
Evans, P. J
Oztarhan, A
Brown, I. G
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 19 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LBL-38514
テクニカルリポート番号 : DE97 000920
テクニカルリポート番号 : CONF-96099413
Holding library: 国立国会図書館
Call No.: LS-DE97/000920
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005863708
http://id.ndl.go.jp/bib/000005863708
Bibliographic Record Category (NDL): 291