Evaluation of the porous silicon capacitor as a moisture sensor for vacuum applications SAND-96-2061 DE97 000586

Evaluation of the porous silicon capacitor as a moisture sensor for vacuum applications

SAND-96-2061 DE97 000586

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Material Type: 規格・テクニカルリポート類
Title: Evaluation of the porous silicon capacitor as a moisture sensor for vacuum applications
Author/Editor: Zavadil, K. R
Cordes, G. T
Kelly, M. J
Guilinger, T. R
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 26 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-2061
テクニカルリポート番号 : DE97 000586
Holding library: 国立国会図書館
Call No.: LS-DE97/000586
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005863717
http://id.ndl.go.jp/bib/000005863717
Bibliographic Record Category (NDL): 291