Planarization techniques for MEMS: enabling new structures and enhancing manufacturability SAND-96-2845C DE97 001389 CONF-9612461

Planarization techniques for MEMS: enabling new structures and enhancing manufacturability

SAND-96-2845C DE97 001389 CONF-9612461

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Material Type: 規格・テクニカルリポート類
Title: Planarization techniques for MEMS: enabling new structures and enhancing manufacturability
Author/Editor: Smith, J. H
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 10 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-96-2845C
テクニカルリポート番号 : DE97 001389
テクニカルリポート番号 : CONF-9612461
Holding library: 国立国会図書館
Call No.: LS-DE97/001389
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005865802
http://id.ndl.go.jp/bib/000005865802
Bibliographic Record Category (NDL): 291