Plasma source ion implantation research and applications at Los Alamos National Laboratory LA-UR-96-3610 DE97 001465 CONF-96111017

Plasma source ion implantation research and applications at Los Alamos National Laboratory

LA-UR-96-3610 DE97 001465 CONF-96111017

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

Japan Atomic Energy Agency's Library Catalog
Paper
Japan Atomic Energy Agency's Library Catalog

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 規格・テクニカルリポート類
Title: Plasma source ion implantation research and applications at Los Alamos National Laboratory
Author/Editor: Munson, C. P
Faehl, R. J
Henins, I
Publication Date: 1996
Publication Date (W3CDTF): 1996
Extent: 5 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LA-UR-96-3610
テクニカルリポート番号 : DE97 001465
テクニカルリポート番号 : CONF-96111017
Holding library: 国立国会図書館
Call No.: LS-DE97/001465
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005866627
http://id.ndl.go.jp/bib/000005866627
Bibliographic Record Category (NDL): 291