Feature analysis and classification of manufacturing signatures based on semiconductor wafermaps CONF-970246-2 DE97 002968

Feature analysis and classification of manufacturing signatures based on semiconductor wafermaps

CONF-970246-2 DE97 002968

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 規格・テクニカルリポート類
Title: Feature analysis and classification of manufacturing signatures based on semiconductor wafermaps
Author/Editor: Tobin, K. W
Gleason, S. S
Karnowski, T. P
Cohen, S. L
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 13 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : CONF-970246-2
テクニカルリポート番号 : DE97 002968
Holding library: 国立国会図書館
Call No.: LS-DE97/002968
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005866839
http://id.ndl.go.jp/bib/000005866839
Bibliographic Record Category (NDL): 291