Wet oxidation of AlxGa(1-x)As: arsenic barriers on the road to mis SAND-97-0309C DE97 003007 CONF-9705171

Wet oxidation of AlxGa(1-x)As: arsenic barriers on the road to mis

SAND-97-0309C DE97 003007 CONF-9705171

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Material Type: 規格・テクニカルリポート類
Title: Wet oxidation of AlxGa(1-x)As: arsenic barriers on the road to mis
Author/Editor: Ashby, C. I. H
Sullivan, J. P
Newcomer, P. P
Missert, N. A
Hou, H. Q
Publication Date: 1997
Publication Date (W3CDTF): 1997
Extent: 7 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-97-0309C
テクニカルリポート番号 : DE97 003007
テクニカルリポート番号 : CONF-9705171
Holding library: 国立国会図書館
Call No.: LS-DE97/003007
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005868542
http://id.ndl.go.jp/bib/000005868542
Bibliographic Record Category (NDL): 291